Intuitive Analysis of Nanometer-scale Engineered Devices (NEDs) and Processes

Kevin W. Lyons

Manufacturing Engineering Laboratory

National Institute of Standards and Technology

Gaithersburg, MD

To support time critical evaluation of issues confronted at the nanometer-scale there is a need to have tools and methods available that enable the user to rapidly explore measurement and engineering/manufacturing options and in identifying other critical problems in a non-intuitive environment. The user can be an engineer, biologist, physicist, or a chemist. To achieve this, one must explore new architectures and computer-interpretable representations that support the development of applications that can span across millimeter, micrometer, and nanometer-size dimensions while accounting for the associated physics that govern the device and environment interaction at each specific size scale. This work presents a model-centric approach that shifts the focus from the functionality of the application to the ability of the model to adequately represent the key attributes of the device and processes used to measure, engineer, or manufacture it. This promotes the interoperability of emerging applications by separating the core information (models) from what you do with the information. Through the use of virtual reality techniques and these computational models, one is able to present the user with key feedback regarding the nanometer scale device or process in a meaningful, and more intuitive way. Ultimately this capability could serve as a powerful tool to evaluate device produceability and affordability concurrent with initial laboratory successes and concept development.

Brief Biography:

Kevin W. Lyons is the Nanomanufacturing Program Manager with the Manufacturing Engineering Laboratory at the National Institute of Standards and Technology, Gaithersburg, MD. The Nanomanufacturing Program objective is to support U.S. industry in moving nanomanufacturing technologies into production within this decade by concurrently developing the scientific and engineering foundations necessary to support measurements and standards required to achieve effective and validated nanoscale product and process performance. For more detail, see:

http://www.mel.nist.gov/msid/nanom.htm